Imaging Spectroscopic Ellipsometry
Park Systems Imaging Spectroscopic Ellipsometers combine ellipsometry and optical microscopy for the precise characterization of micro-structured thin films and materials, achieving a lateral resolution down to 1 µm. Developed and manufactured in Germany.
Referenced Spectroscopic Ellipsometry
Park Systems Referenced Spectroscopic Ellipsometer compares sample and a reference and combines the high sensitivity of ellipsometry with the measurement speed of reflectometry. Up to 200 high-resolution spectra per second in single-shot measurements. Developed and manufactured in Germany.
Accessories
A wide range of accessories and extensions is available for Park Systems ellipsometry systems, enabling flexible configuration for different measurement tasks.