Imaging Spectroscopic Ellipsometry combines the benefits of ellipsometry and optical microscopy in a single, imaging-based metrology approach. By capturing many measurement points simultaneously within the camera field of view, imaging ellipsometry transforms conventional point-based measurements into spatially resolved analysis of thin films and surfaces. As an all-optical, non-contact and non-destructive technique, Imaging Spectroscopic Ellipsometry enables the characterization of micro-structured thin-film samples with microscopic lateral resolution down to 1 µm. Depending on system configuration, it provides fully spectroscopic, quantitative mapping of thickness and optical properties, revealing features and sample variations that remain inaccessible to conventional single-spot ellipsometers.
